
ARMIS.POSTECH.AC.KR
POSTECH, Bio-Medical Electrics Laboratory (Bio-Me)Department of Electrical Engineering. Pohang University of Science and Technology. San-31, Hyoja, Pohang, 790-784, S. Korea. Last revised on March 8, 2013). Professor : Jae Koo Lee. Ph D : Hyoung Cheol Kwon, Sung Kil Kang, Myoung Soo Kim, Hyun Wook Lee, Ho Young Kim, Im Hee Won. M S : Soon Ku Kwon, Chang Woo Myung. Plasma Processing of Semiconductors. Numerical Modelings of Dry Etching Processes and Plasma Devices such as Neutral Beam Etching, ICP Source, CCP Source, and Magnetron Sputter. Plasma Process...
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