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Plasma and Radio Frequency Systems, Components, Services - Aurion Anlagentechnik GmbH

Trade Fairs and Events. Atmospheric Pressure Plasma Sources. Cluster and Inline Systems. RF systems for particle accelerators. Plasma Systems for Reactive Ion Etching, wide variety of chamber layouts available. Plasma Systems for the deposition of thin films from the gas phase. Plasma Systems for the deposition of thin films by means of sputtering processes. Atmospheric Pressure Plasma Sources. Unique Integration of electrical supply and plasma generation. Aurion is certified for DIN EN 9001:2008.

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Plasma and Radio Frequency Systems, Components, Services - Aurion Anlagentechnik GmbH | aurion-online.com Reviews
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Trade Fairs and Events. Atmospheric Pressure Plasma Sources. Cluster and Inline Systems. RF systems for particle accelerators. Plasma Systems for Reactive Ion Etching, wide variety of chamber layouts available. Plasma Systems for the deposition of thin films from the gas phase. Plasma Systems for the deposition of thin films by means of sputtering processes. Atmospheric Pressure Plasma Sources. Unique Integration of electrical supply and plasma generation. Aurion is certified for DIN EN 9001:2008.
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Plasma and Radio Frequency Systems, Components, Services - Aurion Anlagentechnik GmbH | aurion-online.com Reviews

https://aurion-online.com

Trade Fairs and Events. Atmospheric Pressure Plasma Sources. Cluster and Inline Systems. RF systems for particle accelerators. Plasma Systems for Reactive Ion Etching, wide variety of chamber layouts available. Plasma Systems for the deposition of thin films from the gas phase. Plasma Systems for the deposition of thin films by means of sputtering processes. Atmospheric Pressure Plasma Sources. Unique Integration of electrical supply and plasma generation. Aurion is certified for DIN EN 9001:2008.

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1

Data sheets - Aurion Anlagentechnik GmbH

http://www.aurion-online.com/data-sheets.html

Trade Fairs and Events. Atmospheric Pressure Plasma Sources. Automatically tuned impedance matching network for low power applications. Depends on the load impedance. RS 232 or Profibus. Automatically tuned impedance matching network. Depends on the load impedance. 7/16 jack, 7/8' EIA (optional). RS 232 or Profibus. Automatically tuned impedance matching network with cylindric design (for round cathodes). Depends on the load impedance. 7/16 jack, 7/8' EIA (optional). RS 232 or Profibus. Ansicht von oben ).

2

Components - Aurion Anlagentechnik GmbH

http://www.aurion-online.com/components.html

Trade Fairs and Events. Atmospheric Pressure Plasma Sources. Automatic Impedance Matching Networks (Matchboxes). Transmission Lines and Connectors. Get free well advised. Tel 49(0) 6182 96 28 -0. Fax 49(0) 6182 96 28 -16. 110;eue_wege@aurion.de. Your Name or Company *. Your Phone number: *. 80;lease add 8 and 5. 80;lease add 8 and 5. Trade Fairs and Events. Atmospheric Pressure Plasma Sources.

3

Publications about plasma technology - Aurion Anlagentechnik GmbH

http://www.aurion-online.com/publications.html

Trade Fairs and Events. Atmospheric Pressure Plasma Sources. Sputtering at atmospheric pressure. Highly efficient rf impedance matching network for ICP sources. Biological effects of nitric oxide generated by an atmospheric pressure gas-plasma on human skin cells. Society of Vacuum Coaters 2010/04:. Characterization of a Microwave Microplasma Source Using an Auxiliary Electrode. Contributions to Plasma Physics 2009/11:. Plasma Processes and Polymers 2009/08:. Society of Vacuum Coaters 2009/05:.

4

Microwave - Aurion Anlagentechnik GmbH

http://www.aurion-online.com/microwave.html

Trade Fairs and Events. Atmospheric Pressure Plasma Sources. Compact systems, minimized footprint. High plasma densities for short process times. Optimized homogeneity by plasma-array with 2-dimensional gas inlet system. 10 x 0.8 x 1.8 m. Up to 4 mass flow controllers with a flow rate of up to 500 sccm each. 2 kW, pulsed 4 kW. Sterilization and Barrier Coating. Get free well advised. Tel 49(0) 6182 96 28 -0. Fax 49(0) 6182 96 28 -16. Your Name or Company *. Your Phone number: *. Trade Fairs and Events.

5

Sputtering Systems - Aurion Anlagentechnik GmbH

http://www.aurion-online.com/sputtering-systems.html

Trade Fairs and Events. Atmospheric Pressure Plasma Sources. AURION offers custom made sputtering systems in divers configurations. There are small lab systems with single circular cathodes, batch type systems with rectangular cathodes as well as inline machines. Following please find some examples. Contact us for details! Get free well advised. Tel 49(0) 6182 96 28 -0. Fax 49(0) 6182 96 28 -16. 110;eue_wege@aurion.de. Your Name or Company *. Your Phone number: *. Trade Fairs and Events.

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