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Clarycon: Plasma Technology for Advanced Devices

Plasma Technology for Advanced Devices. Last update: June 7, 2013. 04/28/12: Plasma etch challenges for FinFET transistors. 08/31/10: HP and Hynix to commercialize ReRAM. 08/31/10: Toshiba announces 24 nm NAND flash. 07/19/10: Soft Plasmas for Monolayer Etching. 06/30/10: Barrier to faster integrated circuits may be mere speed bump. 12/20/09: Curing of 193 nm resists.

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Plasma Technology for Advanced Devices. Last update: June 7, 2013. 04/28/12: Plasma etch challenges for FinFET transistors. 08/31/10: HP and Hynix to commercialize ReRAM. 08/31/10: Toshiba announces 24 nm NAND flash. 07/19/10: Soft Plasmas for Monolayer Etching. 06/30/10: Barrier to faster integrated circuits may be mere speed bump. 12/20/09: Curing of 193 nm resists.
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Clarycon: Plasma Technology for Advanced Devices | clarycon.com Reviews

https://clarycon.com

Plasma Technology for Advanced Devices. Last update: June 7, 2013. 04/28/12: Plasma etch challenges for FinFET transistors. 08/31/10: HP and Hynix to commercialize ReRAM. 08/31/10: Toshiba announces 24 nm NAND flash. 07/19/10: Soft Plasmas for Monolayer Etching. 06/30/10: Barrier to faster integrated circuits may be mere speed bump. 12/20/09: Curing of 193 nm resists.

INTERNAL PAGES

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1

Ion Ion Plasma (2)

http://www.clarycon.com/ionionplasma(2).html

Plasma Technology for Advanced Devices. Ion–ion plasmas are plasmas in which the negative charges are negative ions instead of electrons. Ion–ion plasmas may form in the (temporal) afterglow of pulsed discharges in electronegative gases. Ion–ion plasmas may also form in a flowing plasma, sustained by a continuous wave power source. Far enough downstream of the plasma generation zone, the electron concentration can decay substantially to form an ion–ion plasma. The Debye length in an ion–ion plasma ...

2

Clarycon Headlines Archive

http://www.clarycon.com/claryconheadline.html

Plasma Technology for Advanced Devices. Flash(y) Notebooks before end of 2007? Intel 45nm transistor technology. IBM extends immersion lithography to 22nm. Micron announces 25nm flash device. AMD high k / metal gate. IBM announces high k metal gate for 45nm node. Intel announces high k / metal gate in 45nm Penryn processor. STM stops 32nm development. TI stops 32nm development. Freescale to join IBM alliance. Sandisk shows 32Gb SSD at CES2007. SAMSUNG announces 50 nm 16Gb floating gate NAND flash. Micron...

3

Porous Low k

http://www.clarycon.com/porouslowk.html

Plasma Technology for Advanced Devices. Barrier to faster integrated circuits may be mere speed bump, scientists say. Source: American Institute of Physics.

4

Clarycon Flash News

http://www.clarycon.com/claryconflashnew.html

Plasma Technology for Advanced Devices. Toshiba announces that is has started mass production of NAND flash memories using a 24 nm CMOS manufacturing process technology. The chip represents the smallest geometry and the highest density in NAND flash, the company says. The technology has been applied to a 2-bit per cell 64-Gbit memory. The company also plans to offer a 32-Gbit NAND flash memory and 3-bit per cell memory based on the process technology. Research analyst Shaw Wu claims in news reports that ...

5

Plasma Etch

http://www.clarycon.com/plasmaetch.html

Plasma Technology for Advanced Devices. Influence of Mask material in silicon gate etching. Resist mask, dielectric hardmask, carbon hardmask, gate oxide selectivity, reactive layer, carbon concentration on gate oxide, resist coverage, mask selectivity, mask charging, pre-doped gate stack. Sidewall passivation layer formation during gate etch. Anisotropy, sidewall analysis with XPS, mask materials, gas mixtures, oxygen flow, overetch. The selfclean chemistry concept. Chlorine chemistry, gas additives.

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Training Calendar — Stanford Nanofabrication Facility

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Plasma Technology for Advanced Devices

Plasma Technology for Advanced Devices. Monday, February 18, 2008. Etching of SiCO: Effect of Pores. The following experiments investigate the role of pores in etching of porous SiCO low k materials. Slide 1. One possible explanation for this effect is that is the etch chemistry if sufficiently polymerizing and the etch process close to etch stop, the pores at the surface of the material offer additional adsorption places for the polymer precursors and that they can be filled with polymers. The etch chem...

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Clarycon: Plasma Technology for Advanced Devices

Plasma Technology for Advanced Devices. Last update: June 7, 2013. 04/28/12: Plasma etch challenges for FinFET transistors. 08/31/10: HP and Hynix to commercialize ReRAM. 08/31/10: Toshiba announces 24 nm NAND flash. 07/19/10: Soft Plasmas for Monolayer Etching. 06/30/10: Barrier to faster integrated circuits may be mere speed bump. 12/20/09: Curing of 193 nm resists.

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