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1

Lithography Cell Stepper Track Interface

http://www.coaterdeveloperspintrack.com/coaterdeveloperspintrack_010.htm

In an advanced set up the Coater is mated to the exposure system. So, instead of placing the wafer in the output cassette, the wafer is delivered to the exposure tool using an Interface. The interface is part of the track. It feeds wafers to the exposure tool at the appropriate rate. Interfaces are designed specifically for the exposure tool make and model.

2

Photolithography Chemical Cabinets

http://www.coaterdeveloperspintrack.com/coaterdeveloperspintrack_014.htm

The chemicals that feed Coater Developer Track are typically house in a stainless steel chemical cabinet. These cabinets are specifically designed to supply chemical safely. To that end, they should be able to withstand the rupture of a pressurized chemical line and have chemical spill containment. Canisters are steal vessels that, when pressurized, deliver solvents and other chemicals to the point of dispense on the coater developer track. Both coater and developer spin modules are fed solvents via ...

3

Developer Spin Track

http://www.coaterdeveloperspintrack.com/coaterdeveloperspintrack_012.htm

A developer spin module is similar to the coater mentioned earlier. There is automated centering, a spin chuck, a catch cup, and an automated dispense moving arm with multiple chemicals plumbed. Since the developer process is temperature dependent, the develop chemical dispense lines need to be temperature controlled. The chemicals plumbed are Developer and DI Water. The developer chemistry must be compatible with the resist being used. While it is possible to perform positive and negative tone d...Tempe...

4

Post Develop Hard Bake

http://www.coaterdeveloperspintrack.com/coaterdeveloperspintrack_013.htm

After the developer spin process, the wafer sometimes goes through a final bake. This bake is called a Hard Bake. The Hard Bake maximizes the integrity of the resist. It serves to mend micro-cracks, seal pinholes, enhance chemical stability, and improve adhesion. The Hard Bake is not always required. But more often than not, wafers are hard baked after develop. Post Develop Hard Bake.

5

Post Exposure Bake

http://www.coaterdeveloperspintrack.com/coaterdeveloperspintrack_011.htm

Depending on the resist used, the exposed wafer may need to be baked prior to developing. The bake step that is required after exposure, but prior to develop is called the PEB (Post Exposure Bake). When required, this bake step is absolutely essential to activate a chemically amplified resist. The resist manufacturer provides recommended time and temperature PEB details, and the track should be equipped to deploy. Stacked Module Shown Here. Hot Plate on Top.

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