GS68.DE

www.gs68.de - Semiconductor Technology and related Data Analysis

Welcome to www.gs68.de. Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma etching and ion implantation. A growing section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the SPC (statistic process control) or R2R (run to run control) and FDC (fault detection and classification) as well as the various other aspects. Data Analysis and Integration. The informa...

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www.gs68.de - Semiconductor Technology and related Data Analysis | gs68.de Reviews

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Welcome to www.gs68.de. Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma etching and ion implantation. A growing section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the SPC (statistic process control) or R2R (run to run control) and FDC (fault detection and classification) as well as the various other aspects. Data Analysis and Integration. The informa...

<META> KEYWORDS

1 semiconductor manufacturing

2 ion implantation

3 ruby

4 plasma

5 etching

6 glow discharge

7 LSS

8 silicon technology

9 dry etching

10 PFC

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Page content here

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and perl,content,news,plasma etching,publications,tutorials,some introductory material,software,library,disclaimer,function library

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www.gs68.de - Semiconductor Technology and related Data Analysis | gs68.de Reviews

https://gs68.de

Welcome to www.gs68.de. Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma etching and ion implantation. A growing section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the SPC (statistic process control) or R2R (run to run control) and FDC (fault detection and classification) as well as the various other aspects. Data Analysis and Integration. The informa...

INTERNAL PAGES

gs68.de

1

Plasma Processing especially Etching

http://www.gs68.de/plasma_etch/index.html

This site is devoted to plasma processing (etching) in semiconductor manufacturing. Actually you can find the following items on this site:. An unfinished tutorial on low temperature plasma processing in html. A paper on PFC emission reduction during tungsten etchback process from the SPIE conference in Edinburgh (May 2001), see the publications page. Several presentations discussing some aspects of process monitoring and FDC ( fault detection and classification. Data Analysis and Integration.

2

www.gs68.de - News

http://www.gs68.de/news/index.html

This site is not daily updated . so don't expect brand news here. But I am reading this and that journal time by time and I will announce new papers related to the topic, or conferences or web sites . So if you wrote a relevant paper created a new site or . and want me to announce the link or information here, please mail. The APC software described on that page is now available through openAPC Foundation. Data Analysis and Integration. Other important things: Legal Notice.

3

www.gs68.de - Data Analysis and Integration

http://www.gs68.de/data_analysis/index.html

Data Analysis and Integration. Data Analysis and Integration is a very wide field in the semiconductor manufacturing business, on this site we limit ourselves to yield and quality related data (still this is a really huge topic). A possible enumeration of items could look like:. Statistic and advanced process control (APC) software. Statistic Process Control (SPC). Run to Run Control (R2R). Fault Detection and Classification ( FDC. Engineering database for inline, parametric and bin data.

4

www.gs68.de - Presentations: Process Sequences, Etching and more

http://www.gs68.de/publications/index.html

If you like to receive a copy of a paper please mail the webmaster, if available we will send. 9th AEC/APC Europe, Tel Aviv, Israel, 2008,. Recursive least square approach to improve the high product mix overlay R2R control issue,. Gerhard Spitzlsperger, Michaela Speil. ASMC, Stresa, Italy, 2007,. Multivariate Statistical Control of Product Test Data and Yield,. Gerhard Spitzlsperger, Georg Leonardelli, Matthias Frick and Dieter Rathei. ISSM, Tokyo, Japan, 2006,. 6th AEC/APC Europe, Dublin, Ireland, 2005,.

5

www.gs68.de - Semiconductor Technology and related Data Analysis

http://www.gs68.de/index.html

Welcome to www.gs68.de. Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma etching and ion implantation. A growing section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the SPC (statistic process control) or R2R (run to run control) and FDC (fault detection and classification) as well as the various other aspects. Data Analysis and Integration. The informa...

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gs68.de

www.gs68.de - Semiconductor Technology and related Data Analysis

Welcome to www.gs68.de. Within this site you can find mainly material related to CMOS based semiconductor manufacturing, especially plasma etching and ion implantation. A growing section on this site is handling data analysis / integration in semiconductor manufacturing. Here are plenty of fields to be discussed, like the SPC (statistic process control) or R2R (run to run control) and FDC (fault detection and classification) as well as the various other aspects. Data Analysis and Integration. The informa...

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