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Rapid Thermal Processing system launched. SEAL project successfully finalized by end of 2013. Successful demonstration of Ge oxidation by plasma oxidation. Minimum Response Time in US and Worldwide through Partnership with US-based RTPRepair. Is also partner in various EU funded projects for leading edge technology and semiconductor equipment assessment. Develops process technology to constantly improve the oxide reliability on Si and SiC substrates for high performance chips in the manufacturing product...

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Rapid Thermal Processing system launched. SEAL project successfully finalized by end of 2013. Successful demonstration of Ge oxidation by plasma oxidation. Minimum Response Time in US and Worldwide through Partnership with US-based RTPRepair. Is also partner in various EU funded projects for leading edge technology and semiconductor equipment assessment. Develops process technology to constantly improve the oxide reliability on Si and SiC substrates for high performance chips in the manufacturing product...
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Rapid Thermal Processing system launched. SEAL project successfully finalized by end of 2013. Successful demonstration of Ge oxidation by plasma oxidation. Minimum Response Time in US and Worldwide through Partnership with US-based RTPRepair. Is also partner in various EU funded projects for leading edge technology and semiconductor equipment assessment. Develops process technology to constantly improve the oxide reliability on Si and SiC substrates for high performance chips in the manufacturing product...

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SEAL project successfully finalized by end of 2013. WAYTOGO FAST European project kick-off in May 2015. Is an independent German company with unique expertise in equipment engineering, manufacturing and technology development for the semiconductor production value chain. We supply solutions for front-end of line (FEoL) processing in thin film technologies and innovative process engineering. Is also partner in various EU funded projects for leading edge technology and semiconductor equipment assessment.

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