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Patents

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Dr sc ETH Zurich. Assignee: Rofin-Lasag AG; Inventors: C. Rüttimann, U. Dürr, R. Bartlome,. Assembly for processing workpieces by means of a laser beam. Assignee: Schneeberger Holding AG; Inventors: A. Raible, R. Bartlome, Y. Sinquin,. Device for structuring a solar module. Assignee: ETH Zurich; Inventors: R. Bartlome, M. Baer and M.W. Sigrist,. High-temperature multipass cell for absorption spectroscopy of gases and vapors at elevated temperatures.

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Peer-reviewed journals

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Dr sc ETH Zurich. R Bartlome, S. De Wolf, B. Demaurex, C. Ballif, E. Amanatides, D. Mataras. Practical silicon deposition rules derived from silane monitoring during plasma-enhanced chemical vapor deposition. Journal of Applied Physics, vol. 117, art. 203303, 2015. B Demaurex, R. Bartlome, J.P. Seif, J. Geissbühler, D.T.L. Alexander, Q. Jeangros, C. Ballif, and S. De Wolf,. Low-temperature plasma-deposited silicon epitaxial films: growth and properties. Y Sinquin, A. Feltrin, and C. Ballif. Vol 96, pp&#4...

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Conference Proceedings

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Dr sc ETH Zurich. International conferences on photovoltaics. E Amanatides, S. Sfikas, D. Mataras, R. Bartlome, G. Bugnon, F. Sculati-Meillaud, G. Parascandolo, and C. Ballif,. Pressure and flow effect on silane consumption and depletion in the microcrystalline silicon deposition process. Proc of the 27. Solar Energy Conference, Frankfurt, Germany, Sept. 24 –. 28, 2012, pp. 2624 –. Proc of the 37. IEEE Photovoltaic Specialist Conference, Seattle, WA, June 19–24, 2011, pp. 2566 –. G Choong, S. S De Wolf,.

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Dr sc ETH Zurich. R Bartlome, S. De Wolf, B. Demaurex, C. Ballif, E. Amanatides, D. Mataras. Practical silicon deposition rules derived from silane monitoring during plasma-enhanced chemical vapor deposition. Journal of Applied Physics, vol. 117, art. 203303, 2015. B Demaurex, R. Bartlome, J.P. Seif, J. Geissbühler, D.T.L. Alexander, Q. Jeangros, C. Ballif, and S. De Wolf,. Low-temperature plasma-deposited silicon epitaxial films: growth and properties. Y Sinquin, A. Feltrin, and C. Ballif. Vol 96, pp&#4...

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