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UVTech Systems Wafer Semiconductor Laser Edge Cleaning Technology CMP BTA TiN

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CONTACTS AT UVTECHSYSTEMS.COM

UVTech Systems

490 Bo●●●●●●ost Rd

Su●●ry , MA, 01776

US

1.97●●●●7283
1.97●●●●7099
in●●@uvtechsystems.com

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UVTech Systems, Inc.

Millman Jr, Ron

490 Bos●●●●●●●st Road

Su●●ry , MA, 01776

US

1.97●●●●7283
1.97●●●●7099
ro●●●●●●●●●@uvtechsystems.com

View this contact

UVTech Systems, Inc.

Millman Jr, Ron

490 Bos●●●●●●●st Road

Su●●ry , MA, 01776

US

1.97●●●●7283
1.97●●●●7099
ro●●●●●●●●●@uvtechsystems.com

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UVTech Systems Wafer Semiconductor Laser Edge Cleaning Technology CMP BTA TiN
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UVTech Systems Wafer Semiconductor Laser Edge Cleaning Technology CMP BTA TiN

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1

ABOUT US

http://www.uvtechsystems.com/uvtech_systems_website_1-28-14_030.htm

We value creative freedom, diligent effort, teamwork, business integrity, and environmental mindfulness.

2

PRODUCTS

http://www.uvtechsystems.com/uvtech_systems_website_1-28-14_020.htm

LEC-300: Laser Edge Cleaning System. The LEC-300 Laser Cleaning Systems uses an all-dry method to remove organic and inorganic films and metals from the edge surfaces of semiconductor wafers during the chip fabrication process. UVTech's technology eliminates the need for toxic chemicals and hazardous waste treatment. Patents Issued and Pending. LEC-300: Exterior, Interior and Optics. LEC-300: Maintenance and Facility Requirements.

3

APPLICATIONS

http://www.uvtechsystems.com/uvtech_systems_website_1-28-14_009.htm

CMP Residues on SiO 2. PVD Cu, TaN, Ru Stack on SiO 2. PVD-TiN on SiO 2. Post Etch Polymer (PEP) on Si. CMP Residues on SiO2. PVD Cu, TaN, Ru Stack on SiO2. NiPt TiN on Si. Post Etch Polymer (PEP) on Si. NiPt TiN on Si.

4

HOME

http://www.uvtechsystems.com/index.html

UVTech's Process Lab is now available to solve your wafer edge cleaning problems. Customer Process Request Form. Click icon to play). Removes difficult film stacks. Enables 50µm edge location. WAFER EDGE FILM REMOVAL PROCESS LAB. No waste treatment required. SEM Image of edge film removed. 490 Boston Post Rd - Sudbury, MA 01776. 978) 440-7282 - david.elliott@uvtechsystems.com.

5

PUBLICATIONS

http://www.uvtechsystems.com/uvtech_systems_website_1-28-14_002.htm

Wafer Edge Bead Cleaning With Laser Radiation And Reactive Gas. Laser Edge Cleaning Process and Systems. Post CMP Laser Edge Cleaning. Removing BTA And Oxide From Copper With Laser Radiation And Reactive Gas. Video Frame of Laser Edge Cleaning. Photomicrograph of CMP Slurry Edge Cleaned. Laser Edge Cleaning Video.

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LightLine Technologies, Inc. Remote Sensing of Electric Fields. These efforts have been directed towards fields as diverse as the sensing of toxic chemicals in air. Infrared passive range measurement. Fuel cell test equipment. Laser processing of semiconductor materials. And high precision interferometry. Electrical and Mechanical Design.

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Laser Edge Cleaning Technology. SEM: Edge Films Removed. LEC-300: Laser Edge Cleaning System. Patents Issued and Pending. Eliminates sources of killer defects. Enables minimum edge exclusion. Single tool removes multiple films. No waste treatment required. Laser Edge Cleaning Video.

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Bay / Bow Windows. Welcome to UV TECH. Is promoted by a group of professionals who are servicing the construction industry for than two decades, with their wide range of products, with the vast experience we have entered in providing complete solution with uPVC Windows, Doors for morden buildings, the innovative designs and products are still untouched by the competitors. Good for the environment. Usable as fire exits all year long. Appealing and harmonious with the surroundings. RSNo17/2, 17/3 and 15/5,.

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Mike Sellars Managing Director UVTEK t: 44 (0) 844 879 7912 m: 44 (0) 7967 560 303 e: info@uvtek.com.

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