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Dr.LiTHO: Lithography Simulation

Rigorous Electromagnetic Field Modeling. Contact and Proximity Printing. Optimization Methods and Applications. Research and development work is done in cooperation with national and international industrial and academic partners. Present and former project partners include ASML, CNRS, GenIsys, IMEC, Infineon, LETI, Nikon, Sematech International, PTB, University of Texas in Austin, Vistec, Zeiss and others. more.

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Dr.LiTHO: Lithography Simulation | drlitho.com Reviews
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Rigorous Electromagnetic Field Modeling. Contact and Proximity Printing. Optimization Methods and Applications. Research and development work is done in cooperation with national and international industrial and academic partners. Present and former project partners include ASML, CNRS, GenIsys, IMEC, Infineon, LETI, Nikon, Sematech International, PTB, University of Texas in Austin, Vistec, Zeiss and others. more.
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1 news and events
2 research
3 drlitho
4 publications
5 jobs and theses
6 publishing notes
7 data protection
8 research activities
9 image modeling
10 photoresist modeling
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Dr.LiTHO: Lithography Simulation | drlitho.com Reviews

https://drlitho.com

Rigorous Electromagnetic Field Modeling. Contact and Proximity Printing. Optimization Methods and Applications. Research and development work is done in cooperation with national and international industrial and academic partners. Present and former project partners include ASML, CNRS, GenIsys, IMEC, Infineon, LETI, Nikon, Sematech International, PTB, University of Texas in Austin, Vistec, Zeiss and others. more.

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drlitho.com drlitho.com
1

Dr.LiTHO: Publications

http://www.drlitho.com/html/pages/en_publications_index.html

Bahlmann N., Chandrasekhara V., Erdmann A., Hertel P. and Gerhardt R., Lehmann R., Salz D., Schröteler F., Wallenhorst M., and Dötsch H. Improved design of magneto-optic rib waveguides for optical isolators. Journal of Lightwave Technology. Bisschop De P., Erdmann A., and Rathsfeld A. Simulation of the effect of a resist-surface bound air bubble on imaging in immersion lithography. Burger S., Zschiedrich L., Schmidt F., and Erdmann A. and Evanschitzky P. Handbook of Photomask Manufacturing Technology.

2

Dr.LiTHO: Publishing Notes

http://www.drlitho.com/html/pages/en_pub_notes.html

Fraunhofer Institute of Integrated Systems and Device Technology (IISB). 91058 Erlangen, Germany. Is a constituent entity of the Fraunhofer-Gesellschaft, and as such has no separate legal status. Andreas.erdmann@iisb.fraunhofer.de. Zur Foerderung der angewandten Forschung e.V. Phone: 49 (0) 89 / 12 05- 0. Fax: 49 (0) 89 / 12 05-75 31. In accordance with 27 a VAT Tax Act: DE 12951586. Amtsgericht Muenchen (district court). Registration no. VR 4461. 91058 Erlangen, Germany. Notwithstanding this requirement...

3

Dr.LiTHO: Dr.LiTHO

http://www.drlitho.com/html/pages/en_drlitho_index.html

DrLiTHO is a comprehensive simulation environment for photolithography, developed at the Fraunhofer IISB. Its main focus is on development and research applications. Rigorous electromagnetic field solvers for accurate simulation of light diffraction: finite-difference time-domain (FDTD) and the Waveguide Method. Transfer matrix algorithms for the vectorial description of light propagation in planar wafer stacks; the Dill model for the description of lithographic exposures. Simulation studies for the eval...

4

Dr.LiTHO: Jobs and Theses

http://www.drlitho.com/html/pages/en_jobs_index.html

Real-time holography of photoresists. Master thesis / Diplomarbeit). Analysis of statistical process fluctuations. Auto-slicing of lithography masks. Bachelor Thesis / Studienarbeit).

5

Dr.LiTHO: News and Events

http://www.drlitho.com/html/pages/en_events_index.html

11th Lithography Simulation Workshop. September 26-28, 2013 in Hersbruck, Germany. Distribution of Fraunhofer IISB Lithography Simulation Software Dr.LiTHO. Since 2008, the Fraunhofer IISB is marketing its advanced and proven lithography simulation models and software algorithms in its development and research simulator Dr.LiTHO. The software can be purchased from Fraunhofer IISB. DrLiTHO Waveguide with parallelization. A parallelized version of the rigorous EMF solver Waveguide will soon be.

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Supertheme Software

http://www.supertheme.eu/en/project/supertheme-software.html

Circuit Stability Under Process Variability and Electro-Thermal-Mechanical Coupling. Circuit Stability Under Process Variability and Electro-Thermal-Mechanical Coupling. Below you find references to software tools from SUPERTHEME partners which are part of the SUPERTHEME software framework. Lithography Simulator Dr.LiTHO. DrLiTHO is a comprehensive simulation environment for photolithography, developed at the Fraunhofer IISB. Its main focus is on development and research applications. Enigma is the GSS w...

colisa.eu colisa.eu

Software

http://www.colisa.eu/en/project-information/software.html

Fraunhofer Institute for Integrated Systems and Device Technology. Fraunhofer Institute for Integrated Systems and Device Technology. Lithography Simulator Dr.LiTHO. DrLiTHO is a comprehensive simulation environment for photolithography, developed at the Fraunhofer IISB. Its main focus is on development and research applications. Navigation and Social Media. Fraunhofer Institute for Integrated Systems and Device Technology. Date: 31.1.2017 21:57.

colisa.eu colisa.eu

Partners

http://www.colisa.eu/en/project-information/partners.html

Fraunhofer Institute for Integrated Systems and Device Technology. Fraunhofer Institute for Integrated Systems and Device Technology. Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Computational Lithography and Optics Group. Agencia Estadal Consejo Superior de Investigaciones Científicas (CSIC). Spanish National Research Council (CSIC). Universite de Bordeaux 1. Laboratoire de Chimie des Polymères Organiques (LCPO). National Technical University of Athens (NTUA).

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Dr.LiTHO: Lithography Simulation

Rigorous Electromagnetic Field Modeling. Contact and Proximity Printing. Optimization Methods and Applications. Research and development work is done in cooperation with national and international industrial and academic partners. Present and former project partners include ASML, CNRS, GenIsys, IMEC, Infineon, LETI, Nikon, Sematech International, PTB, University of Texas in Austin, Vistec, Zeiss and others. more.

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Dr.LiTHO: Lithography Simulation

Rigorous Electromagnetic Field Modeling. Contact and Proximity Printing. Optimization Methods and Applications. Research and development work is done in cooperation with national and international industrial and academic partners. Present and former project partners include ASML, CNRS, GenIsys, IMEC, Infineon, LETI, Nikon, Sematech International, PTB, University of Texas in Austin, Vistec, Zeiss and others. more.

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Dr.LiTHO: Lithography Simulation

Rigorous Electromagnetic Field Modeling. Contact and Proximity Printing. Optimization Methods and Applications. Research and development work is done in cooperation with national and international industrial and academic partners. Present and former project partners include ASML, CNRS, GenIsys, IMEC, Infineon, LETI, Nikon, Sematech International, PTB, University of Texas in Austin, Vistec, Zeiss and others. more.

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