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etchstop.com

EtchStop-Microfabrication, DRIE and Microfluidics

We offer DRIE services, we build custom design microfluidic devices or we can execute your entire microfabrication process.

http://www.etchstop.com/

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EtchStop-Microfabrication, DRIE and Microfluidics | etchstop.com Reviews
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EtchStop-Microfabrication, DRIE and Microfluidics | etchstop.com Reviews

https://etchstop.com

We offer DRIE services, we build custom design microfluidic devices or we can execute your entire microfabrication process.

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etchstop.com etchstop.com
1

EtchStop-Microfabrication, DRIE and Microfluidics

http://www.etchstop.com/DRIE.html

The STS Pegasus 4 and 6 and the STS glass etcher represent the state of the art in Si and glass DRIE technology. The lab has been operating them for the past couple of years and has accumulated a significant experience developing processes for different patterns. The foundation of MEMS rests heavily on the development of DRIE. The advance of Bosch process. For features on the micron scale or larger the lab operates a few standard recipes. Si DRIE process considerations:. We believe the ideal masking mate...

2

EtchStop-Microfabrication, DRIE and Microfluidics

http://www.etchstop.com/index.html

We operate primarily in the Lurie Nanofabrication Facility (LNF), an NSF funded micro- and nano- fabrication lab affiliated with the Electrical Engineering and Computer Science Department at the University of Michigan, Ann Arbor. [Read more.]. We have been processing in the LNF for more than a decade and we offer experience over a wide range of microfabrication processes and microelectronic design steps. [Read more.]. Contact at etchstop dot com.

3

EtchStop-Microfabrication, DRIE and Microfluidics

http://www.etchstop.com/services.html

We can assist you in various stages of your project. We can help you with the conceptual design, with the layout, we can optimize the process or we can simply execute a specific fabrication process for you. Based on the knowledge of the equipment or previous experience we can design the optimum process for fabricating your device. We can do test runs and figure out the specific parameters for each step and we can recommend the best packaging solution. Graphene synthesis, realease and transfer. Some manuf...

4

EtchStop-Microfabrication, DRIE and Microfluidics

http://www.etchstop.com/downloads.html

Can be used on designs that involve both lithography and bond alignment. The cluster includes a large cross that we typically use with bond aligners and found that the circular lobe windows add some precision to the alignment. The 90 degrees pattern is a great indicator for the quality of most patterning steps. Are good geometric marks for bond alignment. They are very similar to Alignment Mark 1 except the lobes are squared. They also work great with a clear field alignment region. This pattern represen...

5

EtchStop-Microfabrication, DRIE and Microfluidics

http://www.etchstop.com/facility.html

We operate primarily in the Lurie Nanofabrication Facility (LNF), an NSF funded micro- and nano- fabrication lab affiliated with the Electrical Engineering and Computer Science Department at the University of Michigan, Ann Arbor. LNF represents and investment of $100mil. and it is one of the best user facilities in the world, with a significant lead in terms of equipment and expertise related to MEMS. Contact at etchstop dot com.

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EtchStop-Microfabrication, DRIE and Microfluidics

We operate primarily in the Lurie Nanofabrication Facility (LNF), an NSF funded micro- and nano- fabrication lab affiliated with the Electrical Engineering and Computer Science Department at the University of Michigan, Ann Arbor. [Read more.]. We have been processing in the LNF for more than a decade and we offer experience over a wide range of microfabrication processes and microelectronic design steps. [Read more.]. Contact at etchstop dot com.

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